JPS642132U - - Google Patents
Info
- Publication number
- JPS642132U JPS642132U JP9776887U JP9776887U JPS642132U JP S642132 U JPS642132 U JP S642132U JP 9776887 U JP9776887 U JP 9776887U JP 9776887 U JP9776887 U JP 9776887U JP S642132 U JPS642132 U JP S642132U
- Authority
- JP
- Japan
- Prior art keywords
- pressure sensor
- pressure
- display
- displays
- display unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9776887U JPH0645226Y2 (ja) | 1987-06-24 | 1987-06-24 | 表示分離型圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9776887U JPH0645226Y2 (ja) | 1987-06-24 | 1987-06-24 | 表示分離型圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS642132U true JPS642132U (en]) | 1989-01-09 |
| JPH0645226Y2 JPH0645226Y2 (ja) | 1994-11-16 |
Family
ID=30965066
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9776887U Expired - Lifetime JPH0645226Y2 (ja) | 1987-06-24 | 1987-06-24 | 表示分離型圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0645226Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007266503A (ja) * | 2006-03-29 | 2007-10-11 | Nec Electronics Corp | 半導体製造装置 |
-
1987
- 1987-06-24 JP JP9776887U patent/JPH0645226Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007266503A (ja) * | 2006-03-29 | 2007-10-11 | Nec Electronics Corp | 半導体製造装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0645226Y2 (ja) | 1994-11-16 |